真空零組件設備

l         ITEM: Flange, Clamp, Centering Ring, Bellow, Elbow, Tee, Cross,   Reducter,Valve… etc.

l         SPECIFICATION: 3/4”~8”,10”…etc

l         FLANGE: NW(KF),ISO, CF, ASA, JIS...etc.

l         MATERIAL: SS304(L), SS316(L), AL…etc.

 

軟管

Utilizing

l  High vacuum seal

l  Semiconductor process equipment.

l  Medical process equipment.

l  Flexible joints.

l  Expansion joints.

l  Torque Couplings.

l   Motion feedthroughs.

l   Vacuum equipment.

l   Sensing probe/Sensing bellows.

l   Expanding joints.

l   Flexible Couplings.

l   Valve stem seals

 

Material: SUS316 or SUS304

(Available Customizing OD/ID)

 

氣體零組件、設備

l           Items:
VCR, Gland, Female Nut, Male Nut, Gasket, Connector, Elbow, Tee, Cross, Micro Elbow, Tee, Cross, Reducter, Bellow Valve, Diaphragm valve, Ball Valve, Check Valve, Niddle Valve, Materials, Pneumatic

l         Specification: 1/4”, 3/8”, 1/2”, 3/4”

l         Material: EP, PA

 

氣體流量計&控制器

Brooks 5850E MFC

l      Flow rate: 10ssccm~30SLM

l      Accurancy: ±10% Full Scale

l      Repeatability:0.25% of rate

l      Leak Integrity: 1x10-9ATM cc/sec

PC-510 1CH/PC-540 4CH

MFC Readout Control

l   Remote panel-control valve by providing DC24V

l   Input power:90-260Vac, 47-63Hz

l   High bright:3-1/2 LED display   

 

 

Model: PC-615

l          Wide pressure range 1.0*10-3 to 9.9*10+2 Torr

l          Bright green LED display.

l          Full range 90-260Vac power input.

 

幫浦

Rotary Vane Pump

l          Sliding Vane Type Double Stage. 二段式

l          Small Size Light weight. 體積小、重量輕

l          Low noise. 低噪音

l          Anti-oil Back Stream. 防止油逆流

Diffusion Pump

l          High Pumping Speed. 抽氣速率高

l          Low Oil Back Stream. 將油霧化

l          High Fore-Vacuum Pressure 高真空幫浦

l          Precise leak test by helium detector. 精確的氦氣測漏